• RecordNumber
    11444
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .L34
  • Dewey Class
    621
  • Dewey Number
    .381
  • Dewey Date
    /5
  • Author

    Lee, Hong H.

  • Title

    Fundamentals of microelectronics processing

  • Author Statement
    Hong H. Lee
  • Publication
    McGraw-Hill
  • Publication Year
    c1990
  • Collation
    xvi, 514 p.: ill.; 25 cm
  • Series
    McGraw-Hill chemical engineering series
  • Subject

    Integrated circuits- Design and construction,Integrated circuits- Materials

  • DocumentNumber
    32440
  • Biblography
    Includes bibliographies and index
  • BL
    BL