RecordNumber :
11444
LC Class :
TK
LC Number :
7874
LC CutterNumber :
.L34
Dewey Class :
621
Dewey Number :
.381
Dewey Date :
/5
Author :
Lee, Hong H.
Title :

Fundamentals of microelectronics processing

Author Statement :
Hong H. Lee
Publication :
McGraw-Hill
Publication Year :
c1990
Collation :
xvi, 514 p.: ill.; 25 cm
Series :
McGraw-Hill chemical engineering series
Subject :
Integrated circuits- Design and construction,Integrated circuits- Materials
DocumentNumber :
32440
Biblography :
Includes bibliographies and index
BL :
BL
Link To Document :

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