RecordNumber
11444
LC Class
TK
LC Number
7874
LC CutterNumber
.L34
Dewey Class
621
Dewey Number
.381
Dewey Date
/5
Author
Lee, Hong H.
Title
Fundamentals of microelectronics processing
Author Statement
Hong H. Lee
Publication
McGraw-Hill
Publication Year
c1990
Collation
xvi, 514 p.: ill.; 25 cm
Series
McGraw-Hill chemical engineering series
Subject
Integrated circuits- Design and construction,Integrated circuits- Materials
DocumentNumber
32440
Biblography
Includes bibliographies and index
BL
BL