• RecordNumber
    15179
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .J33
  • LC Date
    1988
  • Dewey Class
    621
  • Dewey Number
    .381
  • Dewey Date
    /73
  • Author

    Jaeger, Richard C

  • Title

    Introduction to microelectronic fabrication

  • Author Statement
    Richard C. Jaeger
  • Publication
    Addison-Wesley Pub. Co
  • Publication Year
    c1988
  • Collation
    xiii, 232 p.: ill.; 24 cm
  • Series
    Modular series on solid state devices ; v. 5
  • Subject

    Integrated circuits- Very large scale integration- Design and construction- Congresses

  • Holding Info.
    0201146959
  • DocumentNumber
    32432
  • Biblography
    Includes bibliographical references and index
  • BL
    BL