RecordNumber
15179
LC Class
TK
LC Number
7874
LC CutterNumber
.J33
LC Date
1988
Dewey Class
621
Dewey Number
.381
Dewey Date
/73
Author
Jaeger, Richard C
Title
Introduction to microelectronic fabrication
Author Statement
Richard C. Jaeger
Publication
Addison-Wesley Pub. Co
Publication Year
c1988
Collation
xiii, 232 p.: ill.; 24 cm
Series
Modular series on solid state devices ; v. 5
Subject
Integrated circuits- Very large scale integration- Design and construction- Congresses
Holding Info.
0201146959
DocumentNumber
32432
Biblography
Includes bibliographical references and index
BL
BL