Author :
Jaeger, Richard C
Title :
Introduction to microelectronic fabrication
Author Statement :
Richard C. Jaeger
Publication :
Addison-Wesley Pub. Co
Collation :
xiii, 232 p.: ill.; 24 cm
Series :
Modular series on solid state devices ; v. 5
Subject :
Integrated circuits- Very large scale integration- Design and construction- Congresses
Holding Info. :
0201146959
Biblography :
Includes bibliographical references and index
