Title :
Introduction to VLSI process engineering
Author Statement :
edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka]
Edition :
English language ed
Collation :
xiii, 210 p.: ill.; 24 cm
Notes :
The English language edition has been translated from the original Japanese publication ... --T.p. verso
Subject :
Integrated circuits- Very large scale integration- Design and construction,Manufacturing processes
ADDED ENTRIES :
Naka, Yuji, 1945-,Kagaku Kogaku Kyokai (Japan)
Holding Info. :
0412395509
Biblography :
Includes bibliographical references (p. [201]-204) and index
