• RecordNumber
    15653
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .I5957
  • LC Date
    1993
  • Dewey Class
    621
  • Dewey Number
    .39
  • Dewey Date
    /5
  • Title

    Introduction to VLSI process engineering

  • Author Statement
    edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka]
  • Edition
    English language ed
  • Publication
    Chapman
  • Collation
    xiii, 210 p.: ill.; 24 cm
  • Notes
    The English language edition has been translated from the original Japanese publication ... --T.p. verso
  • Subject

    Integrated circuits- Very large scale integration- Design and construction,Manufacturing processes

  • ADDED ENTRIES
    Naka, Yuji, 1945-,Kagaku Kogaku Kyokai (Japan)
  • Holding Info.
    0412395509
  • DocumentNumber
    12288
  • Biblography
    Includes bibliographical references (p. [201]-204) and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=15653&Field=0&DTC=100