Ion implantation and plasma assisted processes

RecordNumber :

15807

LC Class :

LC Number :

702.7

LC CutterNumber :

.I55,I6

LC Date :

1988

Dewey Class :

671

Dewey Date :

.73

Title :

Ion implantation and plasma assisted processes

Author Statement :

edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International

Publication :

ASM International

Publication Year :

c1988

Collation :

ix, 205 p.: ill.; 29 cm

Subject :

Ion implantation- Congresses,Ion bombardment- Industrial applications- Congresses,Plasma (Ionized gases)- Industrial applications- Congresses,Metals- Finishing- Congresses

ADDED ENTRIES :

Hochman, Robert F. (Robert Francis), 1928-,Solnick-Legg, Hillary,Legg, Keith O,ASM International. Ion Implantation Committee,ASM International. Plasma Processes Committee

Holding Info. :

0871703300

DocumentNumber :

28123

SubTitle :

: proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

Biblography :

Includes bibliographical references

BL :

Link To Document :

https://library.iut.ac.ir/dL/search/default.aspx?Term=15807&Field=0&DTC=100