Author :
Mayer, James W., 1930-
Title :
Ion implantation in semiconductors, silicon and germanium
Author Statement :
[by] James W. Mayer, Lennart Eriksson and John A. Davies
Publication :
Academic Press
Collation :
xiii, 280 p., illus., 24 cm
Subject :
Ion implantation,Semiconductors
ADDED ENTRIES :
Eriksson, Lennart, 1938- joint author,Davies, John Arthur, 1927- joint author
Holding Info. :
0124808506
Biblography :
Includes bibliographical references.
