• RecordNumber
    18752
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .E495
  • LC Date
    1986
  • Dewey Class
    621
  • Dewey Number
    .381
  • Dewey Date
    /73
  • Author

    Elliott, David J

  • Title

    Microlithography

  • Author Statement
    David J. Elliott
  • Publication
    McGraw-Hill
  • Publication Year
    c1986
  • Collation
    xix, 378 p.: ill.; 24 cm
  • Subject

    Integrated circuits- Very large scale integration- Design and construction,Microlithography,Photoresists

  • Holding Info.
    0070193045
  • DocumentNumber
    32421
  • SubTitle
    : process technology for IC fabrication
  • Biblography
    Includes bibliographies and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=18752&Field=0&DTC=100