RecordNumber
:
18752
LC Class
:
TK
LC Number
:
7874
LC CutterNumber
:
.E495
LC Date
:
1986
Dewey Class
:
621
Dewey Number
:
.381
Dewey Date
:
/73
Author
:
Elliott, David J
Title
:
Microlithography
Author Statement
:
David J. Elliott
Publication
:
McGraw-Hill
Publication Year
:
c1986
Collation
:
xix, 378 p.: ill.; 24 cm
Subject
:
Integrated circuits- Very large scale integration- Design and construction,Microlithography,Photoresists
Holding Info.
:
0070193045
DocumentNumber
:
32421
SubTitle
:
: process technology for IC fabrication
Biblography
:
Includes bibliographies and index
BL
:
BL
Link To Document :
https://library.iut.ac.ir/dL/search/default.aspx?Term=18752&Field=0&DTC=100
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