RecordNumber
22489
LC Class
TK
LC Number
7871.15
LC CutterNumber
.P6,P635
Dewey Class
621
Dewey Number
.381
Dewey Date
/531
Title
Polymers in microlithography
Author Statement
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
Publication
American Chemical Society
Publication Year
1989
Collation
xii, 449 p.: ill.; 24 cm
Series
ACS symposium series, 0097-6156 ; 412
Notes
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Subject
Polymers- Congresses,Photoresists- Congresses
ADDED ENTRIES
Reichmanis, Elsa, 1953-
Holding Info.
0841217017
DocumentNumber
32394
SubTitle
: materials and processes
Biblography
Includes bibliographical references
BL
BL