LC CutterNumber :
.P6,P635
Title :
Polymers in microlithography
Author Statement :
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
Publication :
American Chemical Society
Collation :
xii, 449 p.: ill.; 24 cm
Series :
ACS symposium series, 0097-6156 ; 412
Notes :
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Subject :
Polymers- Congresses,Photoresists- Congresses
ADDED ENTRIES :
Reichmanis, Elsa, 1953-
Holding Info. :
0841217017
SubTitle :
: materials and processes
Biblography :
Includes bibliographical references
