RecordNumber
31702
LC Class
TK
LC Number
7874
LC CutterNumber
.I54
LC Date
1996
Author
International Mechanical Engineering Cogressses and Exposition, 1996, Atlanta, GA.
Title
Microelectromechanical systems (MEMS)
Author Statement
Organizers Mohamed Gad-El Hok ... [et al.]
Publication
ASME
Publication Year
1996
Collation
viii, 460 p.: illus.; 28 cm
Series
DSC -- Vol.59
Subject
Microelectronics -- Congresses,Electromechanical devices -- Congresses
Holding Info.
791815412
Original By
77/03/20
DocumentNumber
43716
SubTitle
: presented at the 1996 International ..., Nov. 17-22, 1996, Atlanta, Georgia
Biblography
Includes index
BL
BL