Author :
International Mechanical Engineering Cogressses and Exposition, 1996, Atlanta, GA.
Title :
Microelectromechanical systems (MEMS)
Author Statement :
Organizers Mohamed Gad-El Hok ... [et al.]
Collation :
viii, 460 p.: illus.; 28 cm
Subject :
Microelectronics -- Congresses,Electromechanical devices -- Congresses
Holding Info. :
791815412
SubTitle :
: presented at the 1996 International ..., Nov. 17-22, 1996, Atlanta, Georgia
Biblography :
Includes index
