Author :
NATO Advanced Study Institute on Microelectronic Materials and Processes (1986 : Il Ciocco, Italy)
Title :
Microelectronic materials and processes
Author Statement :
edited by R.A. Levy
Publication :
Kluwer Academic
Collation :
xiv, 985 p.: ill.; 25 cm
Series :
NATO ASI series. Series E, Applied sciences ; vol. 164
Subject :
Microelectronics- Materials- Congresses,Integrated circuits- Very large scale integration- Design and construction- Congresses
ADDED ENTRIES :
Levy, Roland A.
Holding Info. :
0792301471,0792301471
SubTitle :
: [proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986]
Biblography :
Includes bibliographies
