• RecordNumber
    32906
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .N339
  • LC Date
    1986
  • Dewey Class
    621
  • Dewey Number
    .381
  • Dewey Date
    /7
  • Author

    NATO Advanced Study Institute on Microelectronic Materials and Processes (1986 : Il Ciocco, Italy)

  • Title

    Microelectronic materials and processes

  • Author Statement
    edited by R.A. Levy
  • Publication
    Kluwer Academic
  • Publication Year
    c1989
  • Collation
    xiv, 985 p.: ill.; 25 cm
  • Series
    NATO ASI series. Series E, Applied sciences ; vol. 164
  • Subject

    Microelectronics- Materials- Congresses,Integrated circuits- Very large scale integration- Design and construction- Congresses

  • ADDED ENTRIES
    Levy, Roland A.
  • Holding Info.
    0792301471,0792301471
  • Original By
    77/10
  • DocumentNumber
    44907
  • SubTitle
    : [proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986]
  • Biblography
    Includes bibliographies
  • BL
    BL