RecordNumber
32906
LC Class
TK
LC Number
7874
LC CutterNumber
.N339
LC Date
1986
Dewey Class
621
Dewey Number
.381
Dewey Date
/7
Author
NATO Advanced Study Institute on Microelectronic Materials and Processes (1986 : Il Ciocco, Italy)
Title
Microelectronic materials and processes
Author Statement
edited by R.A. Levy
Publication
Kluwer Academic
Publication Year
c1989
Collation
xiv, 985 p.: ill.; 25 cm
Series
NATO ASI series. Series E, Applied sciences ; vol. 164
Subject
Microelectronics- Materials- Congresses,Integrated circuits- Very large scale integration- Design and construction- Congresses
ADDED ENTRIES
Levy, Roland A.
Holding Info.
0792301471,0792301471
Original By
77/10
DocumentNumber
44907
SubTitle
: [proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986]
Biblography
Includes bibliographies
BL
BL