Title :
Micromechanical systems
Author Statement :
edited by T. Fukuda and W. Menz
Publication :
Elsevier Science
Collation :
viii, 268 p.: ill.; 23 cm
Series :
Handbook of sensors and actuators; v. 6
Subject :
Microelectromechanical systems -- Handbooks, manuals, etc
ADDED ENTRIES :
Fukuda, T., 1948-
Holding Info. :
0444823638
SubTitle :
: principles and technology
Index :
Includes bibliographical references and index
