Micromechanical systems

Author Statement

edited by T. Fukuda and W. Menz

Publication

Elsevier Science

Publication Year

1998

Collation

viii, 268 p.: ill.; 23 cm

Series

Handbook of sensors and actuators; v. 6

Subject

Microelectromechanical systems -- Handbooks, manuals, etc

ADDED ENTRIES

Fukuda, T., 1948-

Holding Info.

0444823638

Original By

78/05

DocumentNumber

46116

SubTitle

: principles and technology

Index

Includes bibliographical references and index

Link To Document