Title :
Copper-fundamental mechanisms for microelectronic applications
Author Statement :
Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann
Collation :
xxviii, 337 p.;ill. ;25 cm
Notes :
"A Wiley-Interscience publication"
Subject :
Semiconductors- Materials,Copper,Metallizing
ADDED ENTRIES :
Verner, Igor V.,1955-
Holding Info. :
0471252565
Biblography :
Includes bibliographical references and index
