Author Statement :
M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.]
Publication :
Oxford University Press
Collation :
viii, 347 p.:ill. (some col.);24 cm
Series :
Series on semiconductor science and technology ;7
Subject :
Semiconductors- Etching,Plasma etching
ADDED ENTRIES :
Stansfield, Barry L
Holding Info. :
019856287
SubTitle :
: fundamentals and applications
Biblography :
Includes bibliographical references and index
