Beam injection assessment of defects in semiconductors

RecordNumber :

39546

LC Class :

LC Number :

611.6

LC CutterNumber :

.D4,B43

LC Date :

1998

Dewey Class :

621

Dewey Number :

.381

Dewey Date :

/52

Title :

Author Statement :

editors: M. Kittler...[et al.]

Publication :

Scitec Pub.

Publication Year :

1998

Collation :

xiv, 537 p.:ill.;26 cm

Subject :

ADDED ENTRIES :

Kittler, M

Holding Info. :

090845039

Original By :

80/05

DocumentNumber :

49629

SubTitle :

: proceedings of the 5th Workshop on ...(BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30- September 3, 1998

Biblography :

Includes bibliographical references and index

BL :

Link To Document :