RecordNumber

39546

LC Class

QC

LC Number

611.6

LC CutterNumber

.D4,B43

LC Date

1998

Dewey Class

621

Dewey Number

.381

Dewey Date

/52

Title

Beam injection assessment of defects in semiconductors

Author Statement

editors: M. Kittler...[et al.]

Publication

Scitec Pub.

Publication Year

1998

Collation

xiv, 537 p.:ill.;26 cm

Subject

Semiconductors- Defects- Congresses

ADDED ENTRIES

Kittler, M

Holding Info.

090845039

Original By

80/05

DocumentNumber

49629

SubTitle

: proceedings of the 5th Workshop on ...(BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30- September 3, 1998

Biblography

Includes bibliographical references and index

BL

BL