Title :
Chemical vapor deposition :
Author Statement :
S. Sivaram
Publication :
Van Nostrand Reinhold
Collation :
xii, 292 p.: illus.; 24 cm
Subject :
Microelectronics industry,Chemical vapor deposition,Microelectronics -- Materials
Holding Info. :
0442010796,0442010796
SubTitle :
thermal and plasma deposition of electronic materials
Biblography :
Includes bibliographical references and index
