• RecordNumber
    4005
  • LC Class
    TK
  • LC Number
    7836
  • LC CutterNumber
    .S54
  • Author

    Sivaram, S

  • Title

    Chemical vapor deposition :

  • Author Statement
    S. Sivaram
  • Publication
    Van Nostrand Reinhold
  • Publication Year
    1995
  • Collation
    xii, 292 p.: illus.; 24 cm
  • Subject

    Microelectronics industry,Chemical vapor deposition,Microelectronics -- Materials

  • Holding Info.
    0442010796,0442010796
  • Original By
    76/08
  • DocumentNumber
    38736
  • SubTitle
    thermal and plasma deposition of electronic materials
  • Biblography
    Includes bibliographical references and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=4005&Field=0&DTC=100