• RecordNumber
    4006
  • LC Class
    TS
  • LC Number
    695
  • LC CutterNumber
    .S54
  • Dewey Class
    621
  • Dewey Number
    .381
  • Dewey Date
    /7
  • Author

    Sherman, Arthur

  • Title

    Chemical vapor deposition for microelectronics

  • Author Statement
    by Arthur Sherman
  • Publication
    Noyes Publications
  • Publication Year
    c1987
  • Collation
    xi, 215 p.: ill.; 25 cm
  • Series
    Materials science and process technology series
  • Subject

    Vapor-plating,Integrated circuits- Design and construction

  • Holding Info.
    0815511361,0815511361
  • DocumentNumber
    33158
  • SubTitle
    : principles, technology, and applications
  • Biblography
    Includes bibliographies and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=4006&Field=0&DTC=100