• RecordNumber
    41115
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .L9597
  • Dewey Class
    621
  • Dewey Date
    .381
  • Author

    Lyshevski, Sergey Edward

  • Title

    MEMS and NEMS

  • Author Statement
    Sergey Edward Lyshevski
  • Publication
    CRC Press
  • Publication Year
    2001
  • Collation
    461 p.: ill.; 24 cm
  • Series
    Nano- and microscience, engineering, technology, and medicine series
  • Subject

    Microelectromechanical systems

  • Holding Info.
    0849312620
  • Original By
    81/03
  • DocumentNumber
    50789
  • SubTitle
    : systems, devices, and structures
  • Biblography
    Includes bibliographical references and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=41115&Field=0&DTC=100