RecordNumber :
41115
LC Class :
TK
LC Number :
7875
LC CutterNumber :
.L9597
Dewey Class :
621
Dewey Date :
.381
Author :
Lyshevski, Sergey Edward
Title :

MEMS and NEMS

Author Statement :
Sergey Edward Lyshevski
Publication :
CRC Press
Publication Year :
2001
Collation :
461 p.: ill.; 24 cm
Series :
Nano- and microscience, engineering, technology, and medicine series
Subject :
Microelectromechanical systems
Holding Info. :
0849312620
Original By :
81/03
DocumentNumber :
50789
SubTitle :
: systems, devices, and structures
Biblography :
Includes bibliographical references and index
BL :
BL
Link To Document :

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