RecordNumber
41445
LC Class
TK
LC Number
7875
LC CutterNumber
.M35
Dewey Class
621
Dewey Date
.381
Author
Maluf, Nadim
Title
introduction to microelectromechanical systems engineering
Author Statement
Nadim Maluf
Publication
Artech House
Publication Year
c2000
Collation
xix, 265 p.:ill.;24 cm
Series
Artech House microelectromechanical systems library
Subject
Microelectromechanical systems
Holding Info.
0890065810,0890065810
Original By
81/03
DocumentNumber
51040
Biblography
Includes bibliographical references and index
BL
BL