• RecordNumber
    41445
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .M35
  • Dewey Class
    621
  • Dewey Date
    .381
  • Author

    Maluf, Nadim

  • Title

    introduction to microelectromechanical systems engineering

  • Author Statement
    Nadim Maluf
  • Publication
    Artech House
  • Publication Year
    c2000
  • Collation
    xix, 265 p.:ill.;24 cm
  • Series
    Artech House microelectromechanical systems library
  • Subject

    Microelectromechanical systems

  • Holding Info.
    0890065810,0890065810
  • Original By
    81/03
  • DocumentNumber
    51040
  • Biblography
    Includes bibliographical references and index
  • BL
    BL