RecordNumber :
41445
LC Class :
TK
LC Number :
7875
LC CutterNumber :
.M35
Dewey Class :
621
Dewey Date :
.381
Author :
Maluf, Nadim
Title :

introduction to microelectromechanical systems engineering

Author Statement :
Nadim Maluf
Publication :
Artech House
Publication Year :
c2000
Collation :
xix, 265 p.:ill.;24 cm
Series :
Artech House microelectromechanical systems library
Subject :
Microelectromechanical systems
Holding Info. :
0890065810,0890065810
Original By :
81/03
DocumentNumber :
51040
Biblography :
Includes bibliographical references and index
BL :
BL
Link To Document :

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