Author :
IEEE International Conference on Micro Electro Mechanical Systems (14th :2001 :Interlaken, Switzerland)
Title :
14th IEEE International Conference on Micro Electro Mechanical Systems
Author Statement :
sponsored by the IEEE Robotics and Automation Society
Collation :
xxxviii, 610 p.:ill.;28 cm
Notes :
At head of title : "Technical Digest"
Subject :
Microelectromechanical systems- Congresses
ADDED ENTRIES :
Title: MEMS 2001
Holding Info. :
0780359984,0780359984
SubTitle :
: MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001
Biblography :
Includes bibliographical references and index
