• RecordNumber
    41939
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .C25
  • Dewey Class
    621
  • Dewey Number
    .3815
  • Dewey Date
    /2
  • Author

    Campbell, Stephen A.,1954-

  • Title

    science and engineering of microelectronic fabrication

  • Author Statement
    Stephen A. Campbell
  • Publication
    Oxford University Press
  • Publication Year
    1996
  • Collation
    xv, 536 p.:ill.;25 cm
  • Series
    Oxford series in electrical engineering
  • Subject

    Semiconductors- Design and construction

  • Holding Info.
    0195105087
  • Original By
    81/05
  • DocumentNumber
    51507
  • Biblography
    Includes bibliographical references and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=41939&Field=0&DTC=100