Author :
Campbell, Stephen A.,1954-
Title :
science and engineering of microelectronic fabrication
Author Statement :
Stephen A. Campbell
Publication :
Oxford University Press
Collation :
xv, 536 p.:ill.;25 cm
Series :
Oxford series in electrical engineering
Subject :
Semiconductors- Design and construction
Holding Info. :
0195105087
Biblography :
Includes bibliographical references and index
