RecordNumber
42105
LC Class
TK
LC Number
7875
LC CutterNumber
.I33
LC Date
2000
Dewey Class
621
Dewey Date
.381
Author
IEEE International Conference on Micro Electro Mechanical Systems (13th :2000 :Miyazaki, Japan)
Title
Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems
Author Statement
sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center
Publication
IEEE
Publication Year
c2000
Collation
xlv, 810 p.:ill.;30 cm
Subject
Microelectromechanical systems- Congresses
ADDED ENTRIES
Title: 2000 IEEE Micro Electro Mechanical Systems
Holding Info.
0780352734
Original By
81/06
DocumentNumber
51640
SubTitle
: MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
Biblography
Includes bibliographical references and index
BL
BL