Author :
IEEE International Conference on Micro Electro Mechanical Systems (13th :2000 :Miyazaki, Japan)
Title :
Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems
Author Statement :
sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center
Collation :
xlv, 810 p.:ill.;30 cm
Subject :
Microelectromechanical systems- Congresses
ADDED ENTRIES :
Title: 2000 IEEE Micro Electro Mechanical Systems
Holding Info. :
0780352734
SubTitle :
: MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
Biblography :
Includes bibliographical references and index
