RecordNumber

42625

LC Class

TH

LC Number

7694

LC CutterNumber

.W48

Dewey Class

620

Dewey Number

.8

Dewey Date

/6

Author

Whyte, W

Title

Cleanroom technology

Author Statement

W. Whyte

Publication

J. Wiley

Publication Year

c2001

Collation

xiv, 309 p.:ill.;24 cm

Subject

Clean rooms

Holding Info.

0471868426

Original By

81/10

DocumentNumber

52025

SubTitle

: fundamentals of design, testing, and operation

Index

Includes index

BL

BL