RecordNumber :
43268
LC Class :
TJ
LC Number :
1191.5
LC CutterNumber :
.M5526
Dewey Class :
621
Dewey Date :
.36
Author :
Minh, Phan Ngoc
Title :

Fabrication of silicon microprobes for optical near-field applications

Author Statement :
Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
Publication :
CRC Press
Publication Year :
c2002
Collation :
180 p.:ill.;25 cm
Subject :
Micromachining,Silicon,Near-field microscopy,Microprobe analysis
ADDED ENTRIES :
Takahito, Ono
Holding Info. :
0849311543
Original By :
82/03
DocumentNumber :
52617
Biblography :
Includes bibliographical references and index
BL :
BL
Link To Document :

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