• RecordNumber
    44949
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .M4537
  • Dewey Class
    681
  • Dewey Number
    2
  • Title

    MEMS mechanical sensors

  • Author Statement
    Stephen Beeby ... [et al.]
  • Publication
    Artech House
  • Publication Year
    c2004
  • Collation
    x, 269 p. ill. 26 cm.
  • Series
    Artech House microelectromechanical system series
  • Subject

    Microelectromechanical systems,Detectors

  • ADDED ENTRIES
    Beeby, Stephen
  • DocumentNumber
    54714
  • Biblography
    Includes bibliographical references and index
  • ISBN
    1580535364
  • BL
    BL