RecordNumber
44949
LC Class
TK
LC Number
7875
LC CutterNumber
.M4537
Dewey Class
681
Dewey Number
2
Title
MEMS mechanical sensors
Author Statement
Stephen Beeby ... [et al.]
Publication
Artech House
Publication Year
c2004
Collation
x, 269 p. ill. 26 cm.
Series
Artech House microelectromechanical system series
Subject
Microelectromechanical systems,Detectors
ADDED ENTRIES
Beeby, Stephen
DocumentNumber
54714
Biblography
Includes bibliographical references and index
ISBN
1580535364
BL
BL