RecordNumber
45640
LC Class
TK
LC Number
7874.76
LC CutterNumber
.T86
Dewey Class
621.39
Dewey Number
5
Author
Tung, Chih-Hang
Title
ULSI semiconductor technology Atlas
Author Statement
Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu
Publication
John Wiley
Publication Year
2003
Collation
xii, 666 p. ill. 26 cm.
Subject
Integrated circuits- Ultra large scale integration- Atlas,Electron microscopy
ADDED ENTRIES
Sheng, George T. T
DocumentNumber
54387
Biblography
Includes bibliographical references and indexes
ISBN
0471457728
BL
BL