• RecordNumber
    45640
  • LC Class
    TK
  • LC Number
    7874.76
  • LC CutterNumber
    .T86
  • Dewey Class
    621.39
  • Dewey Number
    5
  • Author

    Tung, Chih-Hang

  • Title

    ULSI semiconductor technology Atlas

  • Author Statement
    Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu
  • Publication
    John Wiley
  • Publication Year
    2003
  • Collation
    xii, 666 p. ill. 26 cm.
  • Subject

    Integrated circuits- Ultra large scale integration- Atlas,Electron microscopy

  • ADDED ENTRIES
    Sheng, George T. T
  • DocumentNumber
    54387
  • Biblography
    Includes bibliographical references and indexes
  • ISBN
    0471457728
  • BL
    BL