Author :
International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (9th : 2001 : S. Tecla, Italy)
Title :
Gettering and defect engineering in semiconductor technology : GADEST 2001
Author Statement :
editors, V. Raineri ... [et al.]
Publication :
Sci-Tech Pub. Ltd. ; Enfield, N.H. : Trans Tech Pub. Ltd. [distributor]
Collation :
xviii, 823 p. : ill. ; 25 cm
Series :
Diffusion and defect data. Pt. B, Solid state phenomena
Subject :
Semiconductors -- Defects -- Congresses , Getters -- Congresses , Silicon crystals -- Defects -- Congresses
ADDED ENTRIES :
Raineri, V , ,
SubTitle :
proceedings of the 9th International Autumn Meeting ..., on S. Tecla, Italy, September 30-October 3, 2001
Index :
Includes bibliographical references and index
