RecordNumber
46089
LC Class
TK
LC Number
7871.85
LC CutterNumber
.I574
LC Date
2001
Author
International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (9th : 2001 : S. Tecla, Italy)
Title
Gettering and defect engineering in semiconductor technology : GADEST 2001
Author Statement
editors, V. Raineri ... [et al.]
Publication
Sci-Tech Pub. Ltd. ; Enfield, N.H. : Trans Tech Pub. Ltd. [distributor]
Publication Year
c2002
Collation
xviii, 823 p. : ill. ; 25 cm
Series
Diffusion and defect data. Pt. B, Solid state phenomena
Subject
Semiconductors -- Defects -- Congresses , Getters -- Congresses , Silicon crystals -- Defects -- Congresses
ADDED ENTRIES
Raineri, V , ,
SubTitle
proceedings of the 9th International Autumn Meeting ..., on S. Tecla, Italy, September 30-October 3, 2001
Index
Includes bibliographical references and index