MEMS

Author Statement

edited by Mohamed Gad-El-Hak

Publication

CRC/Taylor & Francis

Collation

1 v. (various p.) : ill. ; 26 cm

Series

Mechanical engineering series

Subject

Microelectromechanical systems , Microelectronics , Nanotechnology

ADDED ENTRIES

Gad-el-Hak, Mohamed

SubTitle

introduction and fundamentals

Index

Includes bibliographical references and index

Link To Document