MEMS

Author Statement

edited by Mohamed Gad-el-Hak

Edition

2nd ed

Publication

CRC/Taylor & Francis

Collation

1 v. (various p.) :ill. ; 26 cm

Series

Mechanical engineering series

Subject

Microelectromechanical systems , Microfabrication

ADDED ENTRIES

Gad-el-Hak, Mohamed

SubTitle

design and fabrication

Index

Includes bibliographical references and index

Link To Document