MEMS

Author Statement

edited by Mohamed Gad-el-Hak

Edition

2nd ed

Publication

CRC Press/Taylor & Francis

Collation

1 v. (various pagings) : ill. ; 26 cm

Series

Mechanical engineering series

Subject

Microelectromechanical systems , Detectors , Microactuators , Robots

ADDED ENTRIES

Gad-el-Hak, Mohamed

SubTitle

applications

Index

Includes bibliographical references and index

Link To Document