Micromechanics and nanoscale effects

Author Statement

edited by Vasyl Michael Harik and Li-Shi Luo

Publication

Kluwer Academic

Collation

xv, 240 p. : ill. ; 25 cm

Series

ICASE/LaRC interdisciplinary series in science and engineering

Subject

Microelectronics , Microelectromechanical systems , Actuators

ADDED ENTRIES

Harik, Vasyl Michael

SubTitle

MEMS, multi-scale materials and micro-flows

Link To Document