RecordNumber
47735
LC Class
TA
LC Number
418.9
LC CutterNumber
.N35 O87
Author
Ostrikov, Kostya
Title
Plasma-aided nanofabrication
Author Statement
Kostya (Ken) Ostrikov and Shuyan Xu
Publication
Wiley-VCH
Publication Year
2007
Collation
xiii, 300 p. : ill. (some col.) ; 25 cm
Subject
Nanostructured materials , Plasma engineering , Low temperature plasmas , Manufacturing processes
ADDED ENTRIES
Xu, Shuyan ,
SubTitle
from plasma sources to nanoassembly
Index
Includes bibliographical references and index