LC CutterNumber :
.N35 O87
Author :
Ostrikov, Kostya
Title :
Plasma-aided nanofabrication
Author Statement :
Kostya (Ken) Ostrikov and Shuyan Xu
Collation :
xiii, 300 p. : ill. (some col.) ; 25 cm
Subject :
Nanostructured materials , Plasma engineering , Low temperature plasmas , Manufacturing processes
ADDED ENTRIES :
Xu, Shuyan ,
SubTitle :
from plasma sources to nanoassembly
Index :
Includes bibliographical references and index
