RecordNumber :
49913
LC Class :
TK
LC Number :
7875
LC CutterNumber :
.F73
LC Date :
2010
Author :
Franssila, Sami
Title :

Introduction to microfabrication

Author Statement :
Sami Franssila
Edition :
2nd ed
Publication :
John Wiley & Sons
Publication Year :
2010
Collation :
xiv, 518 p.: ill.
Subject :
Microelectromechanical systems. , Electronic apparatus and appliances. , Microfabrication.
ADDED ENTRIES :
TI
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/06/19
Index :
Includes bibliographical references and index
Link To Document :

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