Title :
MEMS and microsystems
Author Statement :
Tai-Ran Hsu
Publication :
Hoboken, N.J. John Wiley
Collation :
xxv, 550 p. : ill. ; 25 cm
Subject :
Microelectronics , Microelectromechanical systems , Microelectronic packaging
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/06/23
SubTitle :
design, manufacture, and nanoscale engineering
Index :
Includes bibliographical references and index
