RecordNumber
49934
LC Class
TK
LC Number
7874
LC CutterNumber
.H794
LC Date
2008
Author
Hsu, Tai-Ran
Title
MEMS and microsystems
Author Statement
Tai-Ran Hsu
Edition
2nd ed.
Publication
Hoboken, N.J. John Wiley
Publication Year
c2008
Collation
xxv, 550 p. : ill. ; 25 cm
Subject
Microelectronics , Microelectromechanical systems , Microelectronic packaging
ADDED ENTRIES
TI
وارد كنندة اطلاعات
aghaee
تاريخ ورود اطلاعات
1390/06/23
SubTitle
design, manufacture, and nanoscale engineering
Index
Includes bibliographical references and index