Title :
Advanced materials and technologies for micro/nano-devices, sensors and actuators
Author Statement :
edited by Evgeni Gusev, Eric Garfunkel, and Arthur Dideikin
Publication :
Dordrecht Springer
Collation :
x, 314 p.: ill.
Series :
NATO science for peace and security series Series B, Physics and biophysics.
Subject :
Microelectromechanical systems -- Design and construction , Nanotechnology
ADDED ENTRIES :
AU Gusev, Evgeni , AU Garfunkel, Eric , AU Dideikin, Arthur
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/06/28
Index :
Includes bibliographical references and index
