RecordNumber
49944
LC Class
TK
LC Number
153
LC CutterNumber
.M446
LC Date
2006
Title
MEMS/NEMS
Author Statement
edited by Cornelius T. Leondes
Publication
Springer
Publication Year
c2006
Collation
5 v.: ill., 25 cm
Notes
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.
Subject
Microelectromechanical systems -- Design and construction , Nanotechnology
ADDED ENTRIES
AU Leondes, Cornelius T
وارد كنندة اطلاعات
aghaee
تاريخ ورود اطلاعات
1390/06/28
SubTitle
handbook techniques and applications
Index
Includes bibliographical references and index