• RecordNumber
    49944
  • LC Class
    TK
  • LC Number
    153
  • LC CutterNumber
    .M446
  • LC Date
    2006
  • Title

    MEMS/NEMS

  • Author Statement
    edited by Cornelius T. Leondes
  • Publication
    Springer
  • Publication Year
    c2006
  • Collation
    5 v.: ill., 25 cm
  • Notes
    v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.
  • Subject

    Microelectromechanical systems -- Design and construction , Nanotechnology

  • ADDED ENTRIES
    AU Leondes, Cornelius T
  • وارد كنندة اطلاعات
    aghaee
  • تاريخ ورود اطلاعات
    1390/06/28
  • SubTitle
    handbook techniques and applications
  • Index
    Includes bibliographical references and index