• RecordNumber
    49978
  • LC Class
    TP
  • LC Number
    248.25
  • LC CutterNumber
    .B54 M33
  • LC Date
    2012
  • Author

    Madou, Marc J.

  • Title

    From MEMS to Bio-MEMS and Bio-NEMS

  • Author Statement
    Marc J. Madou
  • Edition
    3rd ed
  • Publication
    Boca Raton, FL Taylor & Francis
  • Publication Year
    2012
  • Collation
    xii, 636p.: ill.
  • Series
    Fundamentals of microfabrication and nanotechnology v.3
  • Subject

    BioMEMS , Nanoelectromechanical systems

  • ADDED ENTRIES
    TI , SE , TI Fundamentals of microfabrication and nanotechnology
  • وارد كنندة اطلاعات
    aghaee
  • تاريخ ورود اطلاعات
    1390/07/11
  • SubTitle
    manufacturing techniques and applications
  • Index
    Includes bibliographical references and index