RecordNumber
49978
LC Class
TP
LC Number
248.25
LC CutterNumber
.B54 M33
LC Date
2012
Author
Madou, Marc J.
Title
From MEMS to Bio-MEMS and Bio-NEMS
Author Statement
Marc J. Madou
Edition
3rd ed
Publication
Boca Raton, FL Taylor & Francis
Publication Year
2012
Collation
xii, 636p.: ill.
Series
Fundamentals of microfabrication and nanotechnology v.3
Subject
BioMEMS , Nanoelectromechanical systems
ADDED ENTRIES
TI , SE , TI Fundamentals of microfabrication and nanotechnology
وارد كنندة اطلاعات
aghaee
تاريخ ورود اطلاعات
1390/07/11
SubTitle
manufacturing techniques and applications
Index
Includes bibliographical references and index