LC CutterNumber :
.B54 M33
Title :
From MEMS to Bio-MEMS and Bio-NEMS
Author Statement :
Marc J. Madou
Publication :
Boca Raton, FL Taylor & Francis
Collation :
xii, 636p.: ill.
Series :
Fundamentals of microfabrication and nanotechnology v.3
Subject :
BioMEMS , Nanoelectromechanical systems
ADDED ENTRIES :
TI , SE , TI Fundamentals of microfabrication and nanotechnology
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/07/11
SubTitle :
manufacturing techniques and applications
Index :
Includes bibliographical references and index
