Title :
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Author Statement :
Marc J. Madou
Publication :
Boca Raton, FL
Collation :
xiii, 641 p.: ill.
Series :
Fundamentals of microfabrication and nanotechnology v.1
Subject :
Microelectromechanical systems , Nanoelectromechanical systems , Microfluidics , Solid state physics
ADDED ENTRIES :
TI , SE , TI Fundamentals of microfabrication and nanotechnology
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1390/08/08
Index :
Includes bibliographical references and index
