RecordNumber
49980
LC Class
TK
LC Number
7875
LC CutterNumber
.M33
LC Date
2012
Author
Madou, Marc J.
Title
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Author Statement
Marc J. Madou
Publication
Boca Raton, FL
Publication Year
2012
Collation
xiii, 641 p.: ill.
Series
Fundamentals of microfabrication and nanotechnology v.1
Subject
Microelectromechanical systems , Nanoelectromechanical systems , Microfluidics , Solid state physics
ADDED ENTRIES
TI , SE , TI Fundamentals of microfabrication and nanotechnology
وارد كنندة اطلاعات
aghaee
تاريخ ورود اطلاعات
1390/08/08
Index
Includes bibliographical references and index