Title :
Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Author Statement :
Martin Bring
Publication :
Goteborg Chalmers University of Technology
Collation :
1 volume (various pagings) : illustrations (some color) ; 25 cm.
Series :
Doktorsavhandlingar vid Chalmers tekniska hogskola, ny ser. nr. 2753 , Technical report (Chalmers tekniska hogskola. Department of Microtechnology and Nanoscience) MC2-116
Subject :
Lithography , Mirrors -- Design and construction
وارد كنندة اطلاعات :
aghaee
تاريخ ورود اطلاعات :
1392/11/27
Biblography :
Bibliography
