RecordNumber
51077
LC Class
Z
LC Number
252.5
LC CutterNumber
.L5 B7
LC Date
2008
Author
Bring, Martin
Title
Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Author Statement
Martin Bring
Publication
Goteborg Chalmers University of Technology
Publication Year
2008
Collation
1 volume (various pagings) : illustrations (some color) ; 25 cm.
Series
Doktorsavhandlingar vid Chalmers tekniska hogskola, ny ser. nr. 2753 , Technical report (Chalmers tekniska hogskola. Department of Microtechnology and Nanoscience) MC2-116
Subject
Lithography , Mirrors -- Design and construction
ADDED ENTRIES
TI
وارد كنندة اطلاعات
aghaee
تاريخ ورود اطلاعات
1392/11/27
Biblography
Bibliography