CMOS-MEMS

Author Statement

volume editors: Oliver Brand, Gary K. Fedder

Publication

Weinheim Wiley-VCH

Publication Year

2013

Collation

xiv, 594 p. : ill. ; 25 cm.

Series

Advanced micro & nanosystems

Subject

Metal oxide semiconductors, Complementary , Microelectromechanical systems

ADDED ENTRIES

AU Brand, Oliver 1964 - , AU Fedder, G. K , SE Advanced micro & nanosystems

وارد كنندة اطلاعات

ghasemi

تاريخ ورود اطلاعات

94/11/18

Biblography

Includes bibliographical references and index

Link To Document