RecordNumber :
51719
LC Class :
TK
LC Number :
7874
LC CutterNumber :
.C66
LC Date :
2013
Title :

CMOS-MEMS

Author Statement :
volume editors: Oliver Brand, Gary K. Fedder
Publication :
Weinheim Wiley-VCH
Publication Year :
2013
Collation :
xiv, 594 p. : ill. ; 25 cm.
Series :
Advanced micro & nanosystems
Subject :
Metal oxide semiconductors, Complementary , Microelectromechanical systems
ADDED ENTRIES :
AU Brand, Oliver 1964 - , AU Fedder, G. K , SE Advanced micro & nanosystems
وارد كنندة اطلاعات :
ghasemi
تاريخ ورود اطلاعات :
94/11/18
Biblography :
Includes bibliographical references and index
Link To Document :

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