Author Statement :
volume editors: Oliver Brand, Gary K. Fedder
Publication :
Weinheim Wiley-VCH
Collation :
xiv, 594 p. : ill. ; 25 cm.
Series :
Advanced micro & nanosystems
Subject :
Metal oxide semiconductors, Complementary , Microelectromechanical systems
ADDED ENTRIES :
AU Brand, Oliver 1964 - , AU Fedder, G. K , SE Advanced micro & nanosystems
وارد كنندة اطلاعات :
ghasemi
تاريخ ورود اطلاعات :
94/11/18
Biblography :
Includes bibliographical references and index