Title :
Micro and nano fabrication
Author Statement :
Hans H. Gatzen, Volker Saile, Jürg Leuthold ; with a foreword and introduction by Richard S. Muller
Publication :
Berlin Springer
Collation :
xxvi, 519 p. :ill. ;24 cm.
Subject :
Microfabrication , Microelectromechanical systems , Nanostructured materials , Nanomanufacturing
ADDED ENTRIES :
AU Saile, Volker , AU Leuthold, Jurg , AU Muller, Richard S. , TI
وارد كنندة اطلاعات :
ghasemi
SubTitle :
tools and processes
Biblography :
Includes bibliographical references and index
تاريخ ورود اطلاعات :
1395/03/23
