RecordNumber

52014

LC Class

TS

LC Number

183

LC CutterNumber

.M52

LC Date

2013

Title

Micro process engineering

Author Statement

edited by Norbert Kockmann

Publication

Weinheim Wiley-VCH

Publication Year

2013

Collation

xxii, 507 p. : ill. ; 24 cm.

Series

Advanced micro & nanosystems

Subject

Production engineering , Microtechnology

ADDED ENTRIES

AU Kockmann, Norbert , SE Advanced micro & nanosystems

وارد كنندة اطلاعات

ghasemi

SubTitle

fundamentals, devices, fabrication, an​d applications

Biblography

Includes bibliographical references an​d index

تاريخ ورود اطلاعات

1395/11/05