Title :
Micro process engineering
Author Statement :
edited by Norbert Kockmann
Publication :
Weinheim Wiley-VCH
Collation :
xxii, 507 p. : ill. ; 24 cm.
Series :
Advanced micro & nanosystems
Subject :
Production engineering , Microtechnology
ADDED ENTRIES :
AU Kockmann, Norbert , SE Advanced micro & nanosystems
وارد كنندة اطلاعات :
ghasemi
SubTitle :
fundamentals, devices, fabrication, and applications
Biblography :
Includes bibliographical references and index
تاريخ ورود اطلاعات :
1395/11/05
