RecordNumber :
53191
LC Class :
TS
LC Number :
695
LC CutterNumber :
.M38
LC Date :
1998
Author :
Mattox, D. M.
Title :

Handbook of physical vapor deposition (PVD) processing

Author Statement :
by Donald M. Mattox
Publication :
Noyes Publications,
Publication Year :
c1998
Collation :
xxvii, 917 p. ill. 24 cm.
Subject :
Physical vapor deposition Handbooks, manuals, etc
ADDED ENTRIES :
, ,
تاريخ ورود اطلاعات :
1399/07/20
DocumentNumber :
E92
SubTitle :
film formation, adhesion, surface preparation and contamination control
Index :
ng
Biblography :
Includes bibliographical references and index.
Link To Document :

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