RecordNumber
53191
LC Class
TS
LC Number
695
LC CutterNumber
.M38
LC Date
1998
Author
Mattox, D. M.
Title
Handbook of physical vapor deposition (PVD) processing
Author Statement
by Donald M. Mattox
Publication
Noyes Publications,
Publication Year
c1998
Collation
xxvii, 917 p. ill. 24 cm.
Subject
Physical vapor deposition Handbooks, manuals, etc
ADDED ENTRIES
, ,
تاريخ ورود اطلاعات
1399/07/20
DocumentNumber
E92
SubTitle
film formation, adhesion, surface preparation and contamination control
Index
ng
Biblography
Includes bibliographical references and index.