• RecordNumber
    53191
  • LC Class
    TS
  • LC Number
    695
  • LC CutterNumber
    .M38
  • LC Date
    1998
  • Author

    Mattox, D. M.

  • Title

    Handbook of physical vapor deposition (PVD) processing

  • Author Statement
    by Donald M. Mattox
  • Publication
    Noyes Publications,
  • Publication Year
    c1998
  • Collation
    xxvii, 917 p. ill. 24 cm.
  • Subject

    Physical vapor deposition Handbooks, manuals, etc

  • ADDED ENTRIES
    , ,
  • تاريخ ورود اطلاعات
    1399/07/20
  • DocumentNumber
    E92
  • SubTitle
    film formation, adhesion, surface preparation and contamination control
  • Index
    ng
  • Biblography
    Includes bibliographical references and index.