• RecordNumber
    891
  • LC_Class
    TJ
  • LC_Number
    940
  • LC_CutterNumber
    .J67
  • Doc. No.
    P1241
  • Title

    Journal of Vacuum Science and Technology.

  • Pub.Stat
    College Park, MD American Institute of Physics.
  • Frequency
    BM
  • Title Cha. To
    Journal of Vacuum Science and Technology Part A, Part B
  • Language
    En
  • Print ISSN
    0022-5355
  • Subjects

    Physics

  • Notes
    فيزيك
  • Status
    Effective 1998