RecordNumber
891
LC_Class
TJ
LC_Number
940
LC_CutterNumber
.J67
Doc. No.
P1241
Title
Journal of Vacuum Science and Technology.
Pub.Stat
College Park, MD American Institute of Physics.
Frequency
BM
Title Cha. To
Journal of Vacuum Science and Technology Part A, Part B
Language
En
Print ISSN
0022-5355
Subjects
Physics
Notes
فيزيك
Status
Effective 1998