• RecordNumber
    1027
  • Doc. No.
    754F
  • Call. No.
    754F
  • Author

    Richter, F.,Kupfer, H.,Giegengack, H

  • Title of Article

    Fundamental mechanisms of titanium nitride formation by d.c. magnetron sputtering

  • Title Of Periodical
    SURFACE AND COATINGS TECHNOLOGY
  • VolumNumber
    V.54/55
  • Date
    (1992)
  • Page
    P.338-342
  • Indexer
    1378/12
  • IndexDate
    Ghasemi
  • اطلاعات ثبت
    GN136780