• RecordNumber
    372
  • Doc. No.
    232F
  • Call. No.
    232F
  • Author

    Kewei, Xu,ChenJin, Gao Rensheng

  • Title of Article

    Thermal effects of residual macrostress and microstrain in plasma-assisted CVD TiN films

  • Title Of Periodical
    SURFACE AND COATINGS TECHNOLOGY
  • VolumNumber
    V.58
  • Date
    (1993)
  • Page
    P.37-43
  • Indexer
    1378/8
  • IndexDate
    Maryam
  • اطلاعات ثبت
    GN134996