RecordNumber
372
Doc. No.
232F
Call. No.
232F
Author
Kewei, Xu,ChenJin, Gao Rensheng
Title of Article
Thermal effects of residual macrostress and microstrain in plasma-assisted CVD TiN films
Title Of Periodical
SURFACE AND COATINGS TECHNOLOGY
VolumNumber
V.58
Date
(1993)
Page
P.37-43
Indexer
1378/8
IndexDate
Maryam
اطلاعات ثبت
GN134996