بررسي، مطالعه جامع و ارائه اصول حاكم بر چند روش ميكرو-نانوماشينكاري

چكيده انگليسي :

A Comprehensive Study of the Principles Applying Micro Nano Manufacturing Ali Saeidi a saeidi@me iut ac ir Date of Submission 4 24 2011 Department of Mechanical Engineering Isfahan University of Technology Isfahan 84156 83111 Iran Degree M Sc Language Farsi Supervisor Dr Alireza Fadaie Tehrani mcjaft@cc iut ac ir Abstract In the world we live in the use of micro nano scale products is seen globally and in most cases further miniaturization of these devices is inevitable These products are present in almost every aspect of our life including electronical devices computers and laptops vehicles and automobiles aerospace devices medical devices and many more fields Thereby having full knowledge of this sophisticated technology is essential for the industry and academies of any advanced country In Iran a vast technological gap can be sensed towards this technology and there is great potential for building micro nano research centers and fabrication facilities The first step towards this new industrial revolution the nano revolution is gaining the knowledge of manufacturing and fabrication of miniaturized devices The main objective of this project is to study and review the principles and fundamentals of micro nano manufacturing techniques in an academic and industrial research and to present them in a comprehensive overview and also to outline the devices and instruments needed for micro nano manufacturing The industry of micro nano fabrication is one of the main branches of nanotechnology This industry is a wide field of research and a very broad technology but the top down approaches of micro nano fabrication can be classified to three main techniques nanolithography laser micromachining and tool based micromachining Nanolithography is the technology to selectively pattern substrates of engineering materials including semiconductors metals polymers an etc using wet chemical or dry plasma or gas vapor etching Although this approach of fabrication is a very old one and one of the pioneering techniques of micro fabrication and electronical devices manufacturing but is still under broad research and development Still nanolithography is widely used in the industry for the manufacturing of many micro nano devices Because of the high flexibility of this technology from the beginning of its appearance integrated techniques have also been developed for the fabrication of more complex and smaller devices From the day that Laser was born many researchers have been trying to use its focused beam for manufacturing and machining purposes Specially researchers of nanotechnology were aware of the potential of this device and have gone to many efforts to manipulate this technology for their own advantage Recent advances in the field of ultrashort pulsed lasers have been a great success for the micro nano fabrication field Today femtosecond lasers are one of the most popular devices for micro nano fabrication in industry and research Tool based machining is one of the oldest techniques of shaping engineering materials especially metals This method of manufacturing has undergone many researches and advances since its appearance and great development of techniques machines and tools used for this technology has gathered the attention of many micro nano fabrication researchers Because of its great advances high flexibility of production and lower cost in regard of other techniques this approach has also been very popular amongst other micromanufacturing approaches Many researchers have devoted their efforts to tool based micromachining and have studied the possibility and productibility of many devices and parts using this technology The production and fabrication of many miniaturized devices is highly dependent to having the knowledge and know how of this new technology To be able to successfully manipulate micro nano fabrication

سعيدي، علي

بررسي، مطالعه جامع و ارائه اصول حاكم بر چند روش ميكرو-نانوماشينكاري

نانو تكتولوژي , نانو ليتوگرافي , ليزر , ميكروماشينكاري ابزاري , اچينگ