RecordNumber
15807
LC Class
QC
LC Number
702.7
LC CutterNumber
.I55,I6
LC Date
1988
Dewey Class
671
Dewey Date
.73
Title
Ion implantation and plasma assisted processes
Author Statement
edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International
Publication
ASM International
Publication Year
c1988
Collation
ix, 205 p.: ill.; 29 cm
Subject
Ion implantation- Congresses,Ion bombardment- Industrial applications- Congresses,Plasma (Ionized gases)- Industrial applications- Congresses,Metals- Finishing- Congresses
ADDED ENTRIES
Hochman, Robert F. (Robert Francis), 1928-,Solnick-Legg, Hillary,Legg, Keith O,ASM International. Ion Implantation Committee,ASM International. Plasma Processes Committee
Holding Info.
0871703300
DocumentNumber
28123
SubTitle
: proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
Biblography
Includes bibliographical references
BL
BL