RecordNumber
38190
LC Class
TK
LC Number
7871.85
LC CutterNumber
.M87
Dewey Class
621
Dewey Number
.3815
Dewey Date
/2
Author
Murarka, S. P
Title
Copper-fundamental mechanisms for microelectronic applications
Author Statement
Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann
Publication
John Wiley
Publication Year
c2000
Collation
xxviii, 337 p.;ill. ;25 cm
Notes
"A Wiley-Interscience publication"
Subject
Semiconductors- Materials,Copper,Metallizing
ADDED ENTRIES
Verner, Igor V.,1955-
Holding Info.
0471252565
Original By
80/02
DocumentNumber
48406
Biblography
Includes bibliographical references and index
BL
BL