• RecordNumber
    38594
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .S88
  • Dewey Class
    621
  • Dewey Number
    .3815
  • Dewey Date
    /31
  • Author

    Sugawara, M.

  • Title

    Plasma etching

  • Author Statement
    M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.]
  • Publication
    Oxford University Press
  • Publication Year
    1998
  • Collation
    viii, 347 p.:ill. (some col.);24 cm
  • Series
    Series on semiconductor science and technology ;7
  • Subject

    Semiconductors- Etching,Plasma etching

  • ADDED ENTRIES
    Stansfield, Barry L
  • Holding Info.
    019856287
  • Original By
    80/02
  • DocumentNumber
    48815
  • SubTitle
    : fundamentals and applications
  • Biblography
    Includes bibliographical references and index
  • BL
    BL
    • Link To Document
    https://library.iut.ac.ir/dl/search/default.aspx?Term=38594&Field=0&DTC=100