Title :
Chemical vapor deposition for microelectronics
Author Statement :
by Arthur Sherman
Publication :
Noyes Publications
Collation :
xi, 215 p.: ill.; 25 cm
Series :
Materials science and process technology series
Subject :
Vapor-plating,Integrated circuits- Design and construction
Holding Info. :
0815511361,0815511361
SubTitle :
: principles, technology, and applications
Biblography :
Includes bibliographies and index
