RecordNumber
:
41115
LC Class
:
TK
LC Number
:
7875
LC CutterNumber
:
.L9597
Dewey Class
:
621
Dewey Date
:
.381
Author
:
Lyshevski, Sergey Edward
Title
:
MEMS and NEMS
Author Statement
:
Sergey Edward Lyshevski
Publication
:
CRC Press
Publication Year
:
2001
Collation
:
461 p.: ill.; 24 cm
Series
:
Nano- and microscience, engineering, technology, and medicine series
Subject
:
Microelectromechanical systems
Holding Info.
:
0849312620
Original By
:
81/03
DocumentNumber
:
50789
SubTitle
:
: systems, devices, and structures
Biblography
:
Includes bibliographical references and index
BL
:
BL
Link To Document :
https://library.iut.ac.ir/dL/search/default.aspx?Term=41115&Field=0&DTC=100
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